| 000 | 01090 a2200325 4500 | ||
|---|---|---|---|
| 005 | 20250516163922.0 | ||
| 264 | 0 | _c20140313 | |
| 008 | 201403s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/OE.21.016964 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aMedvedev, V V | |
| 245 | 0 | 0 |
_aInfrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors. _h[electronic resource] |
| 260 |
_bOptics express _cJul 2013 |
||
| 300 |
_a16964-74 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
| 650 | 0 | 4 | _aEquipment Design |
| 650 | 0 | 4 | _aEquipment Failure Analysis |
| 650 | 0 | 4 | _aInfrared Rays |
| 650 | 0 | 4 | _aLenses |
| 650 | 0 | 4 |
_aRefractometry _xinstrumentation |
| 700 | 1 | _avan den Boogaard, A J R | |
| 700 | 1 | _avan der Meer, R | |
| 700 | 1 | _aYakshin, A E | |
| 700 | 1 | _aLouis, E | |
| 700 | 1 | _aKrivtsun, V M | |
| 700 | 1 | _aBijkerk, F | |
| 773 | 0 |
_tOptics express _gvol. 21 _gno. 14 _gp. 16964-74 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.21.016964 _zAvailable from publisher's website |
| 999 |
_c22997812 _d22997812 |
||