| 000 | 01121 a2200265 4500 | ||
|---|---|---|---|
| 005 | 20250516160906.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2166-2746 | ||
| 024 | 7 |
_a10.1116/1.4769970 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
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| 100 | 1 | _aIwai, Yusuke | |
| 245 | 0 | 0 |
_aX-ray tube with a graphite field emitter inflamed at high temperature. _h[electronic resource] |
| 260 |
_bJournal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B _cMar 2013 |
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| 300 |
_a2B106 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aKoike, Takayoshi | |
| 700 | 1 | _aHayama, Youhei | |
| 700 | 1 | _aJouzuka, Atsuo | |
| 700 | 1 | _aNakamura, Tomonori | |
| 700 | 1 | _aOnizuka, Yoshihiro | |
| 700 | 1 | _aMiyoshi, Motosuke | |
| 700 | 1 | _aMimura, Hidenori | |
| 773 | 0 |
_tJournal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B _gvol. 31 _gno. 2 _gp. 2B106 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1116/1.4769970 _zAvailable from publisher's website |
| 999 |
_c22911890 _d22911890 |
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