| 000 | 01030 a2200301 4500 | ||
|---|---|---|---|
| 005 | 20250516152733.0 | ||
| 264 | 0 | _c20131023 | |
| 008 | 201310s 0 0 eng d | ||
| 022 | _a1936-086X | ||
| 024 | 7 |
_a10.1021/nn4016407 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aPolley, Craig M | |
| 245 | 0 | 0 |
_aExploring the limits of N-type ultra-shallow junction formation. _h[electronic resource] |
| 260 |
_bACS nano _cJun 2013 |
||
| 300 |
_a5499-505 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. | ||
| 700 | 1 | _aClarke, Warrick R | |
| 700 | 1 | _aMiwa, Jill A | |
| 700 | 1 | _aScappucci, Giordano | |
| 700 | 1 | _aWells, Justin W | |
| 700 | 1 | _aJaeger, David L | |
| 700 | 1 | _aBischof, Maia R | |
| 700 | 1 | _aReidy, Richard F | |
| 700 | 1 | _aGorman, Brian P | |
| 700 | 1 | _aSimmons, Michelle | |
| 773 | 0 |
_tACS nano _gvol. 7 _gno. 6 _gp. 5499-505 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1021/nn4016407 _zAvailable from publisher's website |
| 999 |
_c22793156 _d22793156 |
||