000 00799 a2200205 4500
005 20250516151000.0
264 0 _c20140107
008 201401s 0 0 eng d
022 _a1521-3773
024 7 _a10.1002/anie.201300755
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aKolasinski, Kurt W
245 0 0 _aThe stoichiometry of electroless silicon etching in solutions of V2O5 and HF.
_h[electronic resource]
260 _bAngewandte Chemie (International ed. in English)
_cJun 2013
300 _a6731-4 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aBarclay, William B
773 0 _tAngewandte Chemie (International ed. in English)
_gvol. 52
_gno. 26
_gp. 6731-4
856 4 0 _uhttps://doi.org/10.1002/anie.201300755
_zAvailable from publisher's website
999 _c22744456
_d22744456