000 00944 a2200277 4500
005 20250516133705.0
264 0 _c20130904
008 201309s 0 0 eng d
022 _a1094-4087
024 7 _a10.1364/OE.21.001181
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aBelt, Michael
245 0 0 _aSidewall gratings in ultra-low-loss Si3N4 planar waveguides.
_h[electronic resource]
260 _bOptics express
_cJan 2013
300 _a1181-8 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.
700 1 _aBovington, Jock
700 1 _aMoreira, Renan
700 1 _aBauters, Jared F
700 1 _aHeck, Martijn J R
700 1 _aBarton, Jonathon S
700 1 _aBowers, John E
700 1 _aBlumenthal, Daniel J
773 0 _tOptics express
_gvol. 21
_gno. 1
_gp. 1181-8
856 4 0 _uhttps://doi.org/10.1364/OE.21.001181
_zAvailable from publisher's website
999 _c22484724
_d22484724