| 000 | 00880 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250516131506.0 | ||
| 264 | 0 | _c20130206 | |
| 008 | 201302s 0 0 eng d | ||
| 022 | _a1931-7573 | ||
| 024 | 7 |
_a10.1186/1556-276X-8-31 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aDebieu, Olivier | |
| 245 | 0 | 0 |
_aStructural and optical characterization of pure Si-rich nitride thin films. _h[electronic resource] |
| 260 |
_bNanoscale research letters _cJan 2013 |
||
| 300 |
_a31 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aNalini, Ramesh Pratibha | |
| 700 | 1 | _aCardin, Julien | |
| 700 | 1 | _aPortier, Xavier | |
| 700 | 1 | _aPerrière, Jacques | |
| 700 | 1 | _aGourbilleau, Fabrice | |
| 773 | 0 |
_tNanoscale research letters _gvol. 8 _gno. 1 _gp. 31 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1186/1556-276X-8-31 _zAvailable from publisher's website |
| 999 |
_c22423880 _d22423880 |
||