000 00965 a2200289 4500
005 20250516104035.0
264 0 _c20121113
008 201211s 0 0 eng d
022 _a1089-7623
024 7 _a10.1063/1.4738880
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aKörstgens, V
245 0 0 _aNote: grazing incidence small and wide angle x-ray scattering combined with imaging ellipsometry.
_h[electronic resource]
260 _bThe Review of scientific instruments
_cJul 2012
300 _a076107 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aMeier, R
700 1 _aRuderer, M A
700 1 _aGuo, S
700 1 _aChiang, H-Y
700 1 _aPerlich, J
700 1 _aRoth, S V
700 1 _aGehrke, R
700 1 _aMüller-Buschbaum, P
773 0 _tThe Review of scientific instruments
_gvol. 83
_gno. 7
_gp. 076107
856 4 0 _uhttps://doi.org/10.1063/1.4738880
_zAvailable from publisher's website
999 _c21991985
_d21991985