| 000 | 00725 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20250516100100.0 | ||
| 264 | 0 | _c20121123 | |
| 008 | 201211s 0 0 eng d | ||
| 022 | _a1556-276X | ||
| 024 | 7 |
_a10.1186/1556-276X-7-323 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aKolasinski, Kurt W | |
| 245 | 0 | 0 |
_aElectroless etching of Si with IO3- and related species. _h[electronic resource] |
| 260 |
_bNanoscale research letters _cJun 2012 |
||
| 300 |
_a323 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aGogola, Jacob W | |
| 773 | 0 |
_tNanoscale research letters _gvol. 7 _gno. 1 _gp. 323 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1186/1556-276X-7-323 _zAvailable from publisher's website |
| 999 |
_c21880837 _d21880837 |
||