| 000 | 00955 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250516050845.0 | ||
| 264 | 0 | _c20111209 | |
| 008 | 201112s 0 0 eng d | ||
| 022 | _a1089-7623 | ||
| 024 | 7 |
_a10.1063/1.3606445 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aGerling, John | |
| 245 | 0 | 0 |
_aImage sensor as a three-channel spectrometer with application to in situ monitoring of wet etching. _h[electronic resource] |
| 260 |
_bThe Review of scientific instruments _cJul 2011 |
||
| 300 |
_a075103 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
| 650 | 0 | 4 |
_aAluminum _xchemistry |
| 650 | 0 | 4 |
_aCopper _xchemistry |
| 650 | 0 | 4 |
_aSpectrum Analysis _xmethods |
| 650 | 0 | 4 | _aTime Factors |
| 700 | 1 | _aCheung, Nathan W | |
| 773 | 0 |
_tThe Review of scientific instruments _gvol. 82 _gno. 7 _gp. 075103 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1063/1.3606445 _zAvailable from publisher's website |
| 999 |
_c21051902 _d21051902 |
||