000 00780 a2200205 4500
005 20250516033420.0
264 0 _c20111014
008 201110s 0 0 eng d
022 _a1094-4087
024 7 _a10.1364/OE.19.007507
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aLiao, Bo-Huei
245 0 0 _aAntireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets.
_h[electronic resource]
260 _bOptics express
_cApr 2011
300 _a7507-12 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't
700 1 _aLee, Cheng-Chung
773 0 _tOptics express
_gvol. 19
_gno. 8
_gp. 7507-12
856 4 0 _uhttps://doi.org/10.1364/OE.19.007507
_zAvailable from publisher's website
999 _c20768807
_d20768807