000 | 00780 a2200205 4500 | ||
---|---|---|---|
005 | 20250516033420.0 | ||
264 | 0 | _c20111014 | |
008 | 201110s 0 0 eng d | ||
022 | _a1094-4087 | ||
024 | 7 |
_a10.1364/OE.19.007507 _2doi |
|
040 |
_aNLM _beng _cNLM |
||
100 | 1 | _aLiao, Bo-Huei | |
245 | 0 | 0 |
_aAntireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets. _h[electronic resource] |
260 |
_bOptics express _cApr 2011 |
||
300 |
_a7507-12 p. _bdigital |
||
500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
700 | 1 | _aLee, Cheng-Chung | |
773 | 0 |
_tOptics express _gvol. 19 _gno. 8 _gp. 7507-12 |
|
856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.19.007507 _zAvailable from publisher's website |
999 |
_c20768807 _d20768807 |