000 00837 a2200241 4500
005 20250516032630.0
264 0 _c20110729
008 201107s 0 0 eng d
022 _a1539-4794
024 7 _a10.1364/OL.36.001089
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aChiu, Wei-Chao
245 0 0 _aOptical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems.
_h[electronic resource]
260 _bOptics letters
_cApr 2011
300 _a1089-91 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aChang, Chun-Che
700 1 _aWu, Jiun-Ming
700 1 _aLee, Ming-Chang M
700 1 _aShieh, Jia-Min
773 0 _tOptics letters
_gvol. 36
_gno. 7
_gp. 1089-91
856 4 0 _uhttps://doi.org/10.1364/OL.36.001089
_zAvailable from publisher's website
999 _c20745911
_d20745911