| 000 | 00719 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20250515234431.0 | ||
| 264 | 0 | _c20121002 | |
| 008 | 201210s 0 0 eng d | ||
| 022 | _a1559-128X | ||
| 024 | 7 |
_a10.1364/AO.30.001580 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aHowells, M R | |
| 245 | 0 | 0 |
_aPossibilities for projection x-ray lithography using holographic optical elements. _h[electronic resource] |
| 260 |
_bApplied optics _cMay 1991 |
||
| 300 |
_a1580-2 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aJacobsen, C | |
| 773 | 0 |
_tApplied optics _gvol. 30 _gno. 13 _gp. 1580-2 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/AO.30.001580 _zAvailable from publisher's website |
| 999 |
_c20038081 _d20038081 |
||