000 00939 a2200289 4500
005 20250515231316.0
264 0 _c20160809
008 201608s 0 0 eng d
022 _a1931-7573
024 7 _a10.1007/s11671-008-9190-9
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aLi, Xiaoru
245 0 0 _aPhotolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays.
_h[electronic resource]
260 _bNanoscale research letters
_cDec 2008
300 _a521-3 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aSong, Guojun
700 1 _aPeng, Zhi
700 1 _aShe, Xilin
700 1 _aLi, Jianjiang
700 1 _aSun, Jin
700 1 _aZhou, Di
700 1 _aLi, Peidong
700 1 _aShao, Zengjun
773 0 _tNanoscale research letters
_gvol. 3
_gno. 12
_gp. 521-3
856 4 0 _uhttps://doi.org/10.1007/s11671-008-9190-9
_zAvailable from publisher's website
999 _c19943173
_d19943173