| 000 | 01180 a2200361 4500 | ||
|---|---|---|---|
| 005 | 20250515220935.0 | ||
| 264 | 0 | _c20101022 | |
| 008 | 201010s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/OE.18.006957 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aYakshin, A E | |
| 245 | 0 | 0 |
_aProperties of broadband depth-graded multilayer mirrors for EUV optical systems. _h[electronic resource] |
| 260 |
_bOptics express _cMar 2010 |
||
| 300 |
_a6957-71 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
| 650 | 0 | 4 | _aAlgorithms |
| 650 | 0 | 4 | _aEquipment Design |
| 650 | 0 | 4 | _aModels, Statistical |
| 650 | 0 | 4 | _aOptical Devices |
| 650 | 0 | 4 | _aOptics and Photonics |
| 650 | 0 | 4 |
_aPhysics _xmethods |
| 650 | 0 | 4 | _aReproducibility of Results |
| 650 | 0 | 4 | _aScattering, Radiation |
| 650 | 0 | 4 | _aSurface Properties |
| 650 | 0 | 4 | _aTime Factors |
| 700 | 1 | _aKozhevnikov, I V | |
| 700 | 1 | _aZoethout, E | |
| 700 | 1 | _aLouis, E | |
| 700 | 1 | _aBijkerk, F | |
| 773 | 0 |
_tOptics express _gvol. 18 _gno. 7 _gp. 6957-71 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.18.006957 _zAvailable from publisher's website |
| 999 |
_c19748484 _d19748484 |
||