000 00922 a2200289 4500
005 20250515193624.0
264 0 _c20100222
008 201002s 0 0 eng d
022 _a1089-7623
024 7 _a10.1063/1.3233938
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aLynn, Alan G
245 0 0 _aThe HelCat dual-source plasma device.
_h[electronic resource]
260 _bThe Review of scientific instruments
_cOct 2009
300 _a103501 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aGilmore, Mark
700 1 _aWatts, Christopher
700 1 _aHerrea, Janis
700 1 _aKelly, Ralph
700 1 _aWill, Steve
700 1 _aXie, Shuangwei
700 1 _aYan, Lincan
700 1 _aZhang, Yue
773 0 _tThe Review of scientific instruments
_gvol. 80
_gno. 10
_gp. 103501
856 4 0 _uhttps://doi.org/10.1063/1.3233938
_zAvailable from publisher's website
999 _c19282831
_d19282831