| 000 | 00706 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20250515190228.0 | ||
| 264 | 0 | _c20121002 | |
| 008 | 201210s 0 0 eng d | ||
| 022 | _a0146-9592 | ||
| 024 | 7 |
_a10.1364/ol.17.000390 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aJahns, J | |
| 245 | 0 | 0 |
_aPrecise alignment through thick wafers using an optical copying techniquev. _h[electronic resource] |
| 260 |
_bOptics letters _cMar 1992 |
||
| 300 |
_a390-2 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aDäschner, W | |
| 773 | 0 |
_tOptics letters _gvol. 17 _gno. 6 _gp. 390-2 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/ol.17.000390 _zAvailable from publisher's website |
| 999 |
_c19180790 _d19180790 |
||