| 000 | 01047 a2200313 4500 | ||
|---|---|---|---|
| 005 | 20250515123244.0 | ||
| 264 | 0 | _c20080821 | |
| 008 | 200808s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/oe.16.004698 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aGermer, Thomas A | |
| 245 | 0 | 0 |
_aCalibration of wafer surface inspection systems using spherical silica nanoparticles. _h[electronic resource] |
| 260 |
_bOptics express _cMar 2008 |
||
| 300 |
_a4698-705 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 650 | 0 | 4 | _aCalibration |
| 650 | 0 | 4 | _aLasers |
| 650 | 0 | 4 |
_aMaterials Testing _xmethods |
| 650 | 0 | 4 |
_aNanoparticles _xchemistry |
| 650 | 0 | 4 |
_aRefractometry _xmethods |
| 650 | 0 | 4 |
_aSilicon Dioxide _xchemistry |
| 650 | 0 | 4 | _aSurface Properties |
| 650 | 0 | 4 | _aUnited States |
| 700 | 1 | _aWolters, Christian | |
| 700 | 1 | _aBrayton, Don | |
| 773 | 0 |
_tOptics express _gvol. 16 _gno. 7 _gp. 4698-705 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/oe.16.004698 _zAvailable from publisher's website |
| 999 |
_c18028305 _d18028305 |
||