000 00830 a2200205 4500
005 20250515105618.0
264 0 _c20121002
008 201210s 0 0 eng d
022 _a0885-3010
024 7 _a10.1109/58.677610
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aHachigo, A
245 0 0 _aSAW device modeling including velocity dispersion based on ZnO/diamond/Si layered structures.
_h[electronic resource]
260 _bIEEE transactions on ultrasonics, ferroelectrics, and frequency control
_c1998
300 _a660-6 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aMalocha, D C
773 0 _tIEEE transactions on ultrasonics, ferroelectrics, and frequency control
_gvol. 45
_gno. 3
_gp. 660-6
856 4 0 _uhttps://doi.org/10.1109/58.677610
_zAvailable from publisher's website
999 _c17750360
_d17750360