| 000 | 00842 a2200217 4500 | ||
|---|---|---|---|
| 005 | 20250515105433.0 | ||
| 264 | 0 | _c20121002 | |
| 008 | 201210s 0 0 eng d | ||
| 022 | _a0885-3010 | ||
| 024 | 7 |
_a10.1109/58.775656 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aChang, S H | |
| 245 | 0 | 0 |
_aAn ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. _h[electronic resource] |
| 260 |
_bIEEE transactions on ultrasonics, ferroelectrics, and frequency control _c1999 |
||
| 300 |
_a897-905 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aTseng, C K | |
| 700 | 1 | _aChien, H C | |
| 773 | 0 |
_tIEEE transactions on ultrasonics, ferroelectrics, and frequency control _gvol. 46 _gno. 4 _gp. 897-905 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1109/58.775656 _zAvailable from publisher's website |
| 999 |
_c17744955 _d17744955 |
||