000 | 00824 a2200217 4500 | ||
---|---|---|---|
005 | 20250515033420.0 | ||
264 | 0 | _c20070724 | |
008 | 200707s 0 0 eng d | ||
022 | _a1089-5639 | ||
024 | 7 |
_a10.1021/jp052623a _2doi |
|
040 |
_aNLM _beng _cNLM |
||
100 | 1 | _aBenedikt, J | |
245 | 0 | 0 |
_aDetailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors. _h[electronic resource] |
260 |
_bThe journal of physical chemistry. A _cNov 2005 |
||
300 |
_a10153-67 p. _bdigital |
||
500 | _aPublication Type: Journal Article | ||
700 | 1 | _aSchram, D C | |
700 | 1 | _avan de Sanden, M C M | |
773 | 0 |
_tThe journal of physical chemistry. A _gvol. 109 _gno. 44 _gp. 10153-67 |
|
856 | 4 | 0 |
_uhttps://doi.org/10.1021/jp052623a _zAvailable from publisher's website |
999 |
_c16429876 _d16429876 |