000 00824 a2200217 4500
005 20250515033420.0
264 0 _c20070724
008 200707s 0 0 eng d
022 _a1089-5639
024 7 _a10.1021/jp052623a
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aBenedikt, J
245 0 0 _aDetailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors.
_h[electronic resource]
260 _bThe journal of physical chemistry. A
_cNov 2005
300 _a10153-67 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aSchram, D C
700 1 _avan de Sanden, M C M
773 0 _tThe journal of physical chemistry. A
_gvol. 109
_gno. 44
_gp. 10153-67
856 4 0 _uhttps://doi.org/10.1021/jp052623a
_zAvailable from publisher's website
999 _c16429876
_d16429876