| 000 | 00923 a2200229 4500 | ||
|---|---|---|---|
| 005 | 20250515031200.0 | ||
| 264 | 0 | _c20060707 | |
| 008 | 200607s 0 0 eng d | ||
| 022 | _a0885-3010 | ||
| 024 | 7 |
_a10.1109/tuffc.2006.1632674 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aJuuti, Jari A | |
| 245 | 0 | 0 |
_aManufacturing of prestressed piezoelectric unimorphs using a postfired biasing layer. _h[electronic resource] |
| 260 |
_bIEEE transactions on ultrasonics, ferroelectrics, and frequency control _cMay 2006 |
||
| 300 |
_a838-46 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aJantunen, Heli | |
| 700 | 1 | _aMoilanen, Veli-Pekka | |
| 700 | 1 | _aLeppävuori, Seppo | |
| 773 | 0 |
_tIEEE transactions on ultrasonics, ferroelectrics, and frequency control _gvol. 53 _gno. 5 _gp. 838-46 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1109/tuffc.2006.1632674 _zAvailable from publisher's website |
| 999 |
_c16360071 _d16360071 |
||