| 000 | 00831 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20250515025524.0 | ||
| 264 | 0 | _c20060717 | |
| 008 | 200607s 0 0 eng d | ||
| 022 | _a1559-128X | ||
| 024 | 7 |
_a10.1364/ao.45.003510 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aWu, Jean-Yee | |
| 245 | 0 | 0 |
_aEffect of the working gas of the ion-assisted source on the optical and mechanical properties of SiO2 films deposited by dual ion beam sputtering with Si and SiO2 as the starting materials. _h[electronic resource] |
| 260 |
_bApplied optics _cMay 2006 |
||
| 300 |
_a3510-5 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aLee, Cheng-Chung | |
| 773 | 0 |
_tApplied optics _gvol. 45 _gno. 15 _gp. 3510-5 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/ao.45.003510 _zAvailable from publisher's website |
| 999 |
_c16307460 _d16307460 |
||