| 000 | 00896 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250514064557.0 | ||
| 264 | 0 | _c20030724 | |
| 008 | 200307s 0 0 eng d | ||
| 022 | _a1618-2642 | ||
| 024 | 7 |
_a10.1007/s00216-002-1741-9 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aBaunack, S | |
| 245 | 0 | 0 |
_aAES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices. _h[electronic resource] |
| 260 |
_bAnalytical and bioanalytical chemistry _cApr 2003 |
||
| 300 |
_a891-5 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aMenzel, S | |
| 700 | 1 | _aPekarcĂková, M | |
| 700 | 1 | _aSchmidt, H | |
| 700 | 1 | _aAlbert, M | |
| 700 | 1 | _aWetzig, K | |
| 773 | 0 |
_tAnalytical and bioanalytical chemistry _gvol. 375 _gno. 7 _gp. 891-5 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1007/s00216-002-1741-9 _zAvailable from publisher's website |
| 999 |
_c12499113 _d12499113 |
||