| 000 | 00748 a2200229 4500 | ||
|---|---|---|---|
| 005 | 20250514052713.0 | ||
| 264 | 0 | _c20021227 | |
| 008 | 200212s 0 0 eng d | ||
| 022 | _a0028-0836 | ||
| 024 | 7 |
_a10.1038/420378a _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aAlam, Muhammad A | |
| 245 | 0 | 0 |
_aThin dielectric films: Uncorrelated breakdown of integrated circuits. _h[electronic resource] |
| 260 |
_bNature _cNov 2002 |
||
| 300 |
_a378 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aSmith, R Kent | |
| 700 | 1 | _aWeir, Bonnie E | |
| 700 | 1 | _aSilverman, Paul J | |
| 773 | 0 |
_tNature _gvol. 420 _gno. 6914 _gp. 378 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1038/420378a _zAvailable from publisher's website |
| 999 |
_c12265591 _d12265591 |
||