| 000 | 00826 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250514035634.0 | ||
| 264 | 0 | _c20020724 | |
| 008 | 200207s 0 0 eng d | ||
| 022 | _a1559-128X | ||
| 024 | 7 |
_a10.1364/ao.41.003961 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aChen, Hsuen-Li | |
| 245 | 0 | 0 |
_aFabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications. _h[electronic resource] |
| 260 |
_bApplied optics _cJul 2002 |
||
| 300 |
_a3961-5 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aChu, Tieh-Chi | |
| 700 | 1 | _aHsu, Chien-Kui | |
| 700 | 1 | _aKo, Fu-Hsiang | |
| 700 | 1 | _aHuang, Tiao-Yuan | |
| 773 | 0 |
_tApplied optics _gvol. 41 _gno. 19 _gp. 3961-5 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/ao.41.003961 _zAvailable from publisher's website |
| 999 |
_c11993353 _d11993353 |
||