Modeling of roughness evolution during the etching of inhomogeneous films: material-induced anomalous scaling. [electronic resource]

By: Contributor(s): Producer: 20090716Description: 041604 p. digitalISSN:
  • 1539-3755
Online resources: In: Physical review. E, Statistical, nonlinear, and soft matter physics vol. 79
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Publication Type: Journal Article

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