APA

Sacher W. D., Luo X., Yang Y., Chen F., Lordello T., Mak J. C. C., Liu X., Hu T., Xue T., Guo-Qiang Lo P., Roukes M. L. & Poon J. K. S. (20191230). Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. : Optics express.

Chicago

Sacher Wesley D, Luo Xianshu, Yang Yisu, Chen Fu-Der, Lordello Thomas, Mak Jason C C, Liu Xinyu, Hu Ting, Xue Tianyuan, Guo-Qiang Lo Patrick, Roukes Michael L and Poon Joyce K S. 20191230. Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. : Optics express.

Harvard

Sacher W. D., Luo X., Yang Y., Chen F., Lordello T., Mak J. C. C., Liu X., Hu T., Xue T., Guo-Qiang Lo P., Roukes M. L. and Poon J. K. S. (20191230). Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. : Optics express.

MLA

Sacher Wesley D, Luo Xianshu, Yang Yisu, Chen Fu-Der, Lordello Thomas, Mak Jason C C, Liu Xinyu, Hu Ting, Xue Tianyuan, Guo-Qiang Lo Patrick, Roukes Michael L and Poon Joyce K S. Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. : Optics express. 20191230.