APA

Lederer M., Kämpfe T., Vogel N., Utess D., Volkmann B., Ali T., Olivo R., Müller J., Beyer S., Trentzsch M., Seidel K. & Eng A. L. M. (2020). Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction. : Nanomaterials (Basel, Switzerland).

Chicago

Lederer Maximilian, Kämpfe Thomas, Vogel Norman, Utess Dirk, Volkmann Beate, Ali Tarek, Olivo Ricardo, Müller Johannes, Beyer Sven, Trentzsch Martin, Seidel Konrad and Eng And Lukas M. 2020. Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction. : Nanomaterials (Basel, Switzerland).

Harvard

Lederer M., Kämpfe T., Vogel N., Utess D., Volkmann B., Ali T., Olivo R., Müller J., Beyer S., Trentzsch M., Seidel K. and Eng A. L. M. (2020). Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction. : Nanomaterials (Basel, Switzerland).

MLA

Lederer Maximilian, Kämpfe Thomas, Vogel Norman, Utess Dirk, Volkmann Beate, Ali Tarek, Olivo Ricardo, Müller Johannes, Beyer Sven, Trentzsch Martin, Seidel Konrad and Eng And Lukas M. Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction. : Nanomaterials (Basel, Switzerland). 2020.