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	1.	Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry. [electronic resource] by Villarrubia, J S Tondare, V N Vladár, A E Publication details: Proceedings of SPIE--the International Society for Optical Engineering 2016 In: Proceedings of SPIE--the International Society for Optical Engineering vol. 9778 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Simulated SEM images for resolution measurement. [electronic resource] by Cizmar, P Vladár, A E Ming, B Postek, M T Producer: 20081210 In: Scanning vol. 30 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Application of the low-loss scanning electron microscope image to integrated circuit technology part II--chemically-mechanically planarized samples. [electronic resource] by Wells, O C McGlashan-Powell, M Vladár, A E Postek, M T Producer: 20020115 In: Scanning vol. 23 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Modeling the point-spread function in helium-ion lithography. [electronic resource] by Winston, Donald Ferrera, J Battistella, L Vladár, A E Berggren, K K Producer: 20120823 In: Scanning vol. 34 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	5.	Electron beam-based metrology after CMOS. [electronic resource] by Liddle, J A Hoskins, B D Vladár, A E Villarrubia, J S Publication details: APL materials 2018 In: APL materials vol. 6 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	6.	Application of the low-loss scanning electron microscope image to integrated circuit technology. Part 1--Applications to accurate dimension measurements. [electronic resource] by Postek, M T Vladár, A E Wells, O C Lowney, J L Producer: 20011101 In: Scanning vol. 23 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	7.	Image sharpness measurement in the scanning electron-microscope--part III. [electronic resource] by Zhang, N F Postek, M T Larrabee, R D Vladár, A E Keery, W J Jones, S N Producer: 19991028 In: Scanning vol. 21 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	8.	Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library. [electronic resource] by Villarrubia, J S Vladár, A E Ming, B Kline, R J Sunday, D F Chawla, J S List, S Producer: 20150820 In: Ultramicroscopy vol. 154 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	9.	Metrology for the next generation of semiconductor devices. [electronic resource] by Orji, N G Badaroglu, M Barnes, B M Beitia, C Bunday, B D Celano, U Kline, R J Neisser, M Obeng, Y Vladar, A E Publication details: Nature electronics 2018 In: Nature electronics vol. 1 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)