APA

Guillous S., Bourin C., Ban D'Etat B., Benyagoub A., Cassimi A., Feierstein C., Gardés E., Giglio E., Girard S., Grygiel C., Houel A., Lebius H., Méry A., Monnet I., Ramillon J., Rangama J., Ropars F., Verzeroli E., Viteau M. & Delobbe A. (20180129). A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. : The Review of scientific instruments.

Chicago

Guillous S, Bourin C, Ban D'Etat B, Benyagoub A, Cassimi A, Feierstein C, Gardés E, Giglio E, Girard S, Grygiel C, Houel A, Lebius H, Méry A, Monnet I, Ramillon J-M, Rangama J, Ropars F, Verzeroli E, Viteau M and Delobbe A. 20180129. A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. : The Review of scientific instruments.

Harvard

Guillous S., Bourin C., Ban D'Etat B., Benyagoub A., Cassimi A., Feierstein C., Gardés E., Giglio E., Girard S., Grygiel C., Houel A., Lebius H., Méry A., Monnet I., Ramillon J., Rangama J., Ropars F., Verzeroli E., Viteau M. and Delobbe A. (20180129). A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. : The Review of scientific instruments.

MLA

Guillous S, Bourin C, Ban D'Etat B, Benyagoub A, Cassimi A, Feierstein C, Gardés E, Giglio E, Girard S, Grygiel C, Houel A, Lebius H, Méry A, Monnet I, Ramillon J-M, Rangama J, Ropars F, Verzeroli E, Viteau M and Delobbe A. A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. : The Review of scientific instruments. 20180129.