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Enhancing the defect contrast in ECCI through angular filtering of BSEs. [electronic resource] by
- Han, Han
- Hantschel, Thomas
- Schulze, Andreas
- Strakos, Libor
- Vystavel, Tomas
- Loo, Roger
- Kunert, Bernardette
- Langer, Robert
- Vandervorst, Wilfried
- Caymax, Matty
Publication details: Ultramicroscopy Mar 2020
In:
Ultramicroscopy vol. 210
Availability: No items available.
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Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations. [electronic resource] by
- Han, Han
- Hantschel, Thomas
- Strakos, Libor
- Vystavel, Tomas
- Baryshnikova, Marina
- Mols, Yves
- Kunert, Bernardette
- Langer, Robert
- Vandervorst, Wilfried
- Caymax, Matty
Publication details: Ultramicroscopy Mar 2020
In:
Ultramicroscopy vol. 210
Availability: No items available.
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