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	1.	Polymer-metal coating for high contrast SEM cross sections at the deep nanoscale. [electronic resource] by Staaks, Daniel Olynick, Deirdre L Rangelow, Ivo W Altoe, M Virginia P Producer: 20181214 In: Nanoscale vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Low temperature dry etching of chromium towards control at sub-5 nm dimensions. [electronic resource] by Staaks, Daniel Yang, XiaoMin Lee, Kim Y Dhuey, Scott D Sassolini, Simone Rangelow, Ivo W Olynick, Deirdre L Producer: 20180718 In: Nanotechnology vol. 27 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features. [electronic resource] by Dallorto, Stefano Staaks, Daniel Schwartzberg, Adam Yang, XiaoMin Lee, Kim Y Rangelow, Ivo W Cabrini, Stefano Olynick, Deirdre L Producer: 20180806 In: Nanotechnology vol. 29 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)

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