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	1.	Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy. [electronic resource] by Sohn, Martin Y Barnes, Bryan M Silver, Richard M Publication details: Optik 03 2018 In: Optik vol. 156 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy. [electronic resource] by Bae, Yoon Sung Sohn, Martin Y Lee, Dong-Ryoung Choi, Sang-Soo Producer: 20191105 In: Optics express vol. 27 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Optimizing the nanoscale quantitative optical imaging of subfield scattering targets. [electronic resource] by Henn, Mark-Alexander Barnes, Bryan M Zhou, Hui Sohn, Martin Silver, Richard M Producer: 20180129 In: Optics letters vol. 41 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy. [electronic resource] by Barnes, Bryan M Sohn, Martin Y Goasmat, Francois Zhou, Hui Vladár, András E Silver, Richard M Arceo, Abraham Producer: 20140710 In: Optics express vol. 21 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)