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	1.	Bandwidth optimization design of a multi degree of freedom MEMS gyroscope. [electronic resource] by Si, Chaowei Han, Guowei Ning, Jin Yang, Fuhua Producer: 20140121 In: Sensors (Basel, Switzerland) vol. 13 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes. [electronic resource] by Su, Yan Xu, Pengfei Han, Guowei Si, Chaowei Ning, Jin Yang, Fuhua Publication details: Micromachines Feb 2020 In: Micromachines vol. 11 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. [electronic resource] by Song, Peishuai Si, Chaowei Zhang, Mingliang Zhao, Yongmei He, Yurong Liu, Wen Wang, Xiaodong Producer: 20200116 In: Sensors (Basel, Switzerland) vol. 20 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope. [electronic resource] by Yang, Jian Si, Chaowei Yang, Fan Han, Guowei Ning, Jin Yang, Fuhua Wang, Xiaodong Publication details: Micromachines Feb 2018 In: Micromachines vol. 9 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	5.	A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope. [electronic resource] by Yang, Jian Si, Chaowei Han, Guowei Zhang, Meng Ning, Jin Zhao, Yongmei Wang, Xiaodong Publication details: Micromachines Apr 2019 In: Micromachines vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	6.	Research on Wafer-Level MEMS Packaging with Through-Glass Vias. [electronic resource] by Yang, Fan Han, Guowei Yang, Jian Zhang, Meng Ning, Jin Yang, Fuhua Si, Chaowei Publication details: Micromachines Dec 2018 In: Micromachines vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	7.	Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via. [electronic resource] by Zhang, Meng Yang, Jian He, Yurong Yang, Fan Yang, Fuhua Han, Guowei Si, Chaowei Ning, Jin Producer: 20190103 In: Sensors (Basel, Switzerland) vol. 19 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	8.	PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes. [electronic resource] by Su, Yan Tong, Xin Liu, Nan Han, Guowei Si, Chaowei Ning, Jin Li, Zhaofeng Yang, Fuhua Producer: 20180330 In: Sensors (Basel, Switzerland) vol. 18 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	9.	Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication. [electronic resource] by Zhang, Meng Yang, Jian He, Yurong Yang, Fan Zhao, Yongmei Xue, Fen Han, Guowei Si, Chaowei Ning, Jin Publication details: Micromachines Jun 2019 In: Micromachines vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	10.	A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer. [electronic resource] by Yang, Jian Zhang, Meng He, Yurong Su, Yan Han, Guowei Si, Chaowei Ning, Jin Yang, Fuhua Wang, Xiaodong Publication details: Micromachines Sep 2019 In: Micromachines vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)