APA

Seleznev D., Kozlov A., Kulevoy T., Sitnikov A., Lazarenko P., Vorobyov Y., Smayev M., Yakubov A., Sherchenkov A. & Kozyukhin S. (20200106). The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. : The Review of scientific instruments.

Chicago

Seleznev Dmitry, Kozlov Alexander, Kulevoy Timur, Sitnikov Alexey, Lazarenko Petr, Vorobyov Yuri, Smayev Mikhail, Yakubov Alexey, Sherchenkov Alexey and Kozyukhin Sergey. 20200106. The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. : The Review of scientific instruments.

Harvard

Seleznev D., Kozlov A., Kulevoy T., Sitnikov A., Lazarenko P., Vorobyov Y., Smayev M., Yakubov A., Sherchenkov A. and Kozyukhin S. (20200106). The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. : The Review of scientific instruments.

MLA

Seleznev Dmitry, Kozlov Alexander, Kulevoy Timur, Sitnikov Alexey, Lazarenko Petr, Vorobyov Yuri, Smayev Mikhail, Yakubov Alexey, Sherchenkov Alexey and Kozyukhin Sergey. The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. : The Review of scientific instruments. 20200106.