APA

Shanmugavel S., Yao K., Luong T. D., Oh S. R., Chen Y., Tan C. Y., Gaunekar A., Ng P. H. Y. & Li M. H. L. (20120328). Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining. : IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

Chicago

Shanmugavel Saravanan, Yao Kui, Luong Trung Dung, Oh Sharon Roslyn, Chen Yifan, Tan Chin Yaw, Gaunekar Ajit, Ng Peter Hon Yu and Li Marchy Hing Leung. 20120328. Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining. : IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

Harvard

Shanmugavel S., Yao K., Luong T. D., Oh S. R., Chen Y., Tan C. Y., Gaunekar A., Ng P. H. Y. and Li M. H. L. (20120328). Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining. : IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

MLA

Shanmugavel Saravanan, Yao Kui, Luong Trung Dung, Oh Sharon Roslyn, Chen Yifan, Tan Chin Yaw, Gaunekar Ajit, Ng Peter Hon Yu and Li Marchy Hing Leung. Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining. : IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 20120328.