Results
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1.
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Rhenium ion beam for implantation into semiconductors. [electronic resource] by
- Kulevoy, T V
- Gerasimenko, N N
- Seleznev, D N
- Fedorov, P A
- Temirov, A A
- Alyoshin, M E
- Kraevsky, S V
- Smirnov, D I
- Yakushin, P E
- Khoroshilov, V V
Producer: 20120703
In:
The Review of scientific instruments vol. 83
Availability: No items available.
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2.
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Bernas ion source discharge simulation. [electronic resource] by
- Roudskoy, I
- Kulevoy, T V
- Petrenko, S V
- Kuibeda, R P
- Seleznev, D N
- Pershin, V I
- Hershcovitch, A
- Johnson, B M
- Gushenets, V I
- Oks, E M
- Poole, H P
Producer: 20080430
In:
The Review of scientific instruments vol. 79
Availability: No items available.
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3.
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Development of the ion source for cluster implantation. [electronic resource] by
- Kulevoy, T V
- Seleznev, D N
- Kozlov, A V
- Kuibeda, R P
- Kropachev, G N
- Alexeyenko, O V
- Dugin, S N
- Oks, E M
- Gushenets, V I
- Hershcovitch, A
- Jonson, B
- Poole, H J
Producer: 20141030
In:
The Review of scientific instruments vol. 85
Availability: No items available.
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4.
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Molecular ion sources for low energy semiconductor ion implantation (invited). [electronic resource] by
- Hershcovitch, A
- Gushenets, V I
- Seleznev, D N
- Bugaev, A S
- Dugin, S
- Oks, E M
- Kulevoy, T V
- Alexeyenko, O
- Kozlov, A
- Kropachev, G N
- Kuibeda, R P
- Minaev, S
- Vizir, A
- Yushkov, G Yu
Producer: 20160706
In:
The Review of scientific instruments vol. 87
Availability: No items available.
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5.
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Status of ITEP decaborane ion source program. [electronic resource] by
- Kulevoy, T V
- Petrenko, S V
- Kuibeda, R P
- Seleznev, D N
- Koshelev, V A
- Kozlov, A V
- Stasevich, Yu B
- Sitnikov, A L
- Shamailov, I M
- Pershin, V I
- Hershcovitch, A
- Johnson, B M
- Gushenets, V I
- Oks, E M
- Poole, H P
- Masunov, E S
- Polozov, S M
Producer: 20080430
In:
The Review of scientific instruments vol. 79
Availability: No items available.
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6.
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Ion sources for energy extremes of ion implantation. [electronic resource] by
- Hershcovitch, A
- Johnson, B M
- Batalin, V A
- Kropachev, G N
- Kuibeda, R P
- Kulevoy, T V
- Kolomiets, A A
- Pershin, V I
- Petrenko, S V
- Rudskoy, I
- Seleznev, D N
- Bugaev, A S
- Gushenets, V I
- Litovko, I V
- Oks, E M
- Yushkov, G Yu
- Masunov, E S
- Polozov, S M
- Poole, H J
- Storozhenko, P A
- Svarovski, A Ya
Producer: 20080430
In:
The Review of scientific instruments vol. 79
Availability: No items available.
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