Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films. [electronic resource]
Producer: 20130625Description: 025601 p. digitalISSN:- 1361-6528
- Aluminum Compounds -- chemistry
- Compressive Strength
- Conductometry -- instrumentation
- Crystallization -- methods
- Diamond -- chemistry
- Elastic Modulus
- Equipment Design
- Equipment Failure Analysis
- Membranes, Artificial
- Metal Nanoparticles -- chemistry
- Micro-Electrical-Mechanical Systems -- instrumentation
- Miniaturization
- Particle Size
- Tensile Strength
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't
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