[A microfabricated ICP source base on planar spiral-shaped coil]. [electronic resource]

By: Contributor(s): Producer: 20100528Description: 2708-12 p. digitalISSN:
  • 1000-0593
 In: Guang pu xue yu guang pu fen xi = Guang pu vol. 28
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Publication Type: English Abstract; Journal Article

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