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Reduction of charge impurities in a silicon metal-oxide-semiconductor quantum dot qubit device patterned with nano-imprint lithography. [electronic resource]

By:

Penthorn, Nicholas E

Contributor(s):

Publication details: Nanotechnology Nov 2019Description: 465302 p. digitalISSN:

1361-6528

Online resources:

Available from publisher's website

In: Nanotechnology vol. 30

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Publication Type: Journal Article

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