APA

Tiggelaar R. M., Berenschot J. W., de Boer J. H., Sanders R. G. P., Gardeniers J. G. E., Oosterbroek R. E., van den Berg A. & Elwenspoek M. C. (20050503). Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. : Lab on a chip.

Chicago

Tiggelaar R M, Berenschot J W, de Boer J H, Sanders R G P, Gardeniers J G E, Oosterbroek R E, van den Berg A and Elwenspoek M C. 20050503. Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. : Lab on a chip.

Harvard

Tiggelaar R. M., Berenschot J. W., de Boer J. H., Sanders R. G. P., Gardeniers J. G. E., Oosterbroek R. E., van den Berg A. and Elwenspoek M. C. (20050503). Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. : Lab on a chip.

MLA

Tiggelaar R M, Berenschot J W, de Boer J H, Sanders R G P, Gardeniers J G E, Oosterbroek R E, van den Berg A and Elwenspoek M C. Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. : Lab on a chip. 20050503.