APA

Luber E., Mohammadi R., Ophus C., Lee Z., Nelson-Fitzpatrick N., Westra K., Evoy S., Dahmen U., Radmilovic V. & Mitlin D. (20121002). Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. : Nanotechnology.

Chicago

Luber E, Mohammadi R, Ophus C, Lee Z, Nelson-Fitzpatrick N, Westra K, Evoy S, Dahmen U, Radmilovic V and Mitlin D. 20121002. Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. : Nanotechnology.

Harvard

Luber E., Mohammadi R., Ophus C., Lee Z., Nelson-Fitzpatrick N., Westra K., Evoy S., Dahmen U., Radmilovic V. and Mitlin D. (20121002). Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. : Nanotechnology.

MLA

Luber E, Mohammadi R, Ophus C, Lee Z, Nelson-Fitzpatrick N, Westra K, Evoy S, Dahmen U, Radmilovic V and Mitlin D. Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. : Nanotechnology. 20121002.