Broadband Dielectric Spectroscopic Characterization of Thermal Stability of Low-k Dielectric Thin Films for Micro- and Nanoelectronic Applications. [electronic resource]

By: Contributor(s): Publication details: ECS journal of solid state science and technology : JSS 2017Description: N155-N162 p. digitalISSN:
  • 2162-8769
Online resources: In: ECS journal of solid state science and technology : JSS vol. 6
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Publication Type: Journal Article

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