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Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors. [electronic resource] by
Publication details: Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B 2019
In: Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B vol. 37
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Publication details: Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society 2018
In: Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society vol. 36
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