APA

Zyulkov I., Madhiwala V., Voronina E., Snelgrove M., Bogan J., O'Connor R., De Gendt S. & Armini S. (2020). Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films. : ACS applied materials & interfaces.

Chicago

Zyulkov Ivan, Madhiwala Viraj, Voronina Ekaterina, Snelgrove Matthew, Bogan Justin, O'Connor Robert, De Gendt Stefan and Armini Silvia. 2020. Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films. : ACS applied materials & interfaces.

Harvard

Zyulkov I., Madhiwala V., Voronina E., Snelgrove M., Bogan J., O'Connor R., De Gendt S. and Armini S. (2020). Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films. : ACS applied materials & interfaces.

MLA

Zyulkov Ivan, Madhiwala Viraj, Voronina Ekaterina, Snelgrove Matthew, Bogan Justin, O'Connor Robert, De Gendt Stefan and Armini Silvia. Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films. : ACS applied materials & interfaces. 2020.