Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell. [electronic resource]

By: Contributor(s): Publication details: Journal of research of the National Institute of Standards and Technology Description: 473-494 p. digitalISSN:
  • 1044-677X
Online resources: In: Journal of research of the National Institute of Standards and Technology vol. 100
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Publication Type: Journal Article

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