Raman spectra of high- κ dielectric layers investigated with micro-Raman spectroscopy comparison with silicon dioxide. [electronic resource]

By: Contributor(s): Producer: 20140415Description: 208081 p. digitalISSN:
  • 1537-744X
Subject(s): Online resources: In: TheScientificWorldJournal vol. 2013
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't

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