Low-temperature atomic layer deposition of copper metal thin films: self-limiting surface reaction of copper dimethylamino-2-propoxide with diethylzinc. [electronic resource]

By: Contributor(s): Producer: 20090730Description: 4536-9 p. digitalISSN:
  • 1521-3773
Online resources: In: Angewandte Chemie (International ed. in English) vol. 48
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Publication Type: Journal Article

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