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	1.	Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films. [electronic resource] by Kerrigan, Marissa M Klesko, Joseph P Blakeney, Kyle J Winter, Charles H Producer: 20180730 In: ACS applied materials & interfaces vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Selective Growth of Interface Layers from Reactions of Sc(MeCp) [electronic resource] by Rahman, Rezwanur Klesko, Joseph P Dangerfield, Aaron Mattson, Eric C Chabal, Yves J Producer: 20180928 In: ACS applied materials & interfaces vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-tert-butyl-1,3-diazadienyl)cobalt and formic acid. [electronic resource] by Kerrigan, Marissa M Klesko, Joseph P Rupich, Sara M Dezelah, Charles L Kanjolia, Ravindra K Chabal, Yves J Winter, Charles H Producer: 20180607 In: The Journal of chemical physics vol. 146 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Thermal Atomic Layer Etching of Silica and Alumina Thin Films Using Trimethylaluminum with Hydrogen Fluoride or Fluoroform. [electronic resource] by Rahman, Rezwanur Mattson, Eric C Klesko, Joseph P Dangerfield, Aaron Rivillon-Amy, Sandrine Smith, David C Hausmann, Dennis Chabal, Yves J Producer: 20180919 In: ACS applied materials & interfaces vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)