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Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction. [electronic resource] by
- Lederer, Maximilian
- Kämpfe, Thomas
- Vogel, Norman
- Utess, Dirk
- Volkmann, Beate
- Ali, Tarek
- Olivo, Ricardo
- Müller, Johannes
- Beyer, Sven
- Trentzsch, Martin
- Seidel, Konrad
- Eng, And Lukas M
Publication details: Nanomaterials (Basel, Switzerland) Feb 2020
In:
Nanomaterials (Basel, Switzerland) vol. 10
Availability: No items available.
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